Inventor
SATOH KOHICHI
JP29 patents
⚠️ This page may combine multiple inventors who share the name “SATOH KOHICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
12 patentsUS9390933B2Jul 12, 2016
Etching method, storage medium and etching apparatus
TOKYO ELECTRON LTD3 citations69
US8673778B2Mar 18, 2014
Tungsten film forming method
TOKYO ELECTRON LTD3 citations63
US12416075B2Sep 16, 2025
Film-forming method and film-forming system
TOKYO ELECTRON LTD0 citations62
US10968514B2Apr 6, 2021
Substrate mounting table
TOKYO ELECTRON LTD0 citations56
US11993841B2May 28, 2024
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations52
US7592256B2Sep 22, 2009
Method of forming tungsten film
TOKYO ELECTRON LTD1 citations51
US12344930B2Jul 1, 2025
Deposition method and deposition apparatus
TOKYO ELECTRON LTD0 citations50
US11280002B2Mar 22, 2022
Placement apparatus and processing apparatus
TOKYO ELECTRON LTD0 citations50
US11702734B2Jul 18, 2023
Method for forming ruthenium film and apparatus for forming ruthenium film
TOKYO ELECTRON LTD0 citations47
US12571104B2Mar 10, 2026
Source gas supply method, source gas supply mechanism, and film forming system
TOKYO ELECTRON LTD0 citations45
US10319585B2Jun 11, 2019
Film forming method
TOKYO ELECTRON LTD0 citations38
US10504743B2Dec 10, 2019
Method of etching film
TOKYO ELECTRON LTD0 citations37
MITSUBISHI CHEM IND
10 patentsUS4957977ASep 18, 1990
Vinylamine copolymer, flocculating agent etc.
MITSUBISHI CHEM IND49 citations96
US4808683AFeb 28, 1989
Vinylamine copolymer, flocculating agent using the same, and process for preparing the same
MITSUBISHI CHEM IND58 citations96
US5064909ANov 12, 1991
Vinylamine copolymer, flocculating agent and paper strength increasing agent using the same, as well as process for producing the same
MITSUBISHI CHEM IND30 citations92
US5037927AAug 6, 1991
Vinylamine copolymer and process for producing same
MITSUBISHI CHEM IND48 citations92
US4567300AJan 28, 1986
Process for producing N-substituted formamides
MITSUBISHI CHEM IND31 citations91
US5554792ASep 10, 1996
N-vinylformamide compositions
MITSUBISHI CHEM IND10 citations73
USRE34713EAug 30, 1994
Vinylamine copolymer flocculating agent etc.
MITSUBISHI CHEM IND5 citations73
US5389203AFeb 14, 1995
Paper-making additives comprising cationic polymers
MITSUBISHI CHEM IND10 citations72
US4824913AApr 25, 1989
Process for preparing water-soluble polymer
MITSUBISHI CHEM IND7 citations72
USRE34903EApr 11, 1995
Vinylamine copolymer, flocculating agent and paper strength increasing agent using the same, as well as process for producing the same
MITSUBISHI CHEM IND2 citations62