Inventor

Liao han-wen

TW20 patents

⚠️ This page may combine multiple inventors who share the name “Liao han-wen”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

Liao han-wen

TAIWAN SEMICONDUCTOR MFG CO LTD

Methods of enhancing surface topography on a substrate for inspection

Reducing metal gate overhang by forming a top-wide bottom-narrow dummy gate electrode

Methods of enhancing surface topography on a substrate for inspection

Methods of enhancing surface topography on a substrate for inspection

Semiconductor device and manufacturing method thereof

Reducing metal gate overhang by forming a top-wide bottom-narrow dummy gate electrode

Wet etch apparatus

Wet etch apparatus

Wet etch apparatus and method of using the same

Plasma processing apparatus and manufacturing method using the same

Cluster tool and manufacuturing method of semiconductor structure using the same

Plasma distribution control

Composite plasma modulator for plasma chamber

Method for etching target layer of semiconductor device in etching apparatus

Semiconductor structure and planarization method thereof

Wet etch apparatus and method for using the same

Target dimension uniformity for semiconductor wafers

TAIWAN SEMICONDUCTOR MFG

Uniformity in wafer patterning using feedback control

Hard mask reshaping

Uniformity in wafer patterning using feedback control