P

Inventor

LIU JUN-XIU

TW32 patents
⚠️ This page may combine multiple inventors who share the name “LIU JUN-XIU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

25 patents
US10825650B2Nov 3, 2020

Machine learning on wafer defect review

TAIWAN SEMICONDUCTOR MFG CO LTD6 citations83
US10504737B2Dec 10, 2019

Methods of enhancing surface topography on a substrate for inspection

TAIWAN SEMICONDUCTOR MFG CO LTD5 citations83
US11816411B2Nov 14, 2023

Method and system for semiconductor wafer defect review

TAIWAN SEMICONDUCTOR MFG CO LTD5 citations82
US12062166B2Aug 13, 2024

Method and system for diagnosing a semiconductor wafer

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US11764094B2Sep 19, 2023

Semiconductor processing tool and methods of operation

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US10784114B2Sep 22, 2020

Methods of enhancing surface topography on a substrate for inspection

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations72
US10504758B2Dec 10, 2019

Nozzle having real time inspection functions

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations71
US11935722B2Mar 19, 2024

Machine learning on wafer defect review

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11449984B2Sep 20, 2022

Method and system for diagnosing a semiconductor wafer

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11424101B2Aug 23, 2022

Machine learning on wafer defect review

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11222788B2Jan 11, 2022

Methods of enhancing surface topography on a substrate for inspection

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12087611B2Sep 10, 2024

Semiconductor processing tool and methods of operation

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12296428B2May 13, 2025

Chemical mechanical polishing apparatus and method

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12191175B2Jan 7, 2025

Nozzle having real time inspection functions

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11355370B2Jun 7, 2022

Nozzle having real time inspection functions

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12190036B2Jan 7, 2025

Method and system for semiconductor wafer defect review

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11017522B2May 25, 2021

Inspection and cleaning system and method for the same

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations59
US12119273B2Oct 15, 2024

System and method for high speed inspection of semiconductor substrates

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations56
US11749571B2Sep 5, 2023

System and method for high speed inspection of semiconductor substrates

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations56
US11107671B2Aug 31, 2021

Method of processing semiconductor substrate

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US10755405B2Aug 25, 2020

Method and system for diagnosing a semiconductor wafer

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US12326397B2Jun 10, 2025

In-situ apparatus for detecting abnormality in process tube

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US12272576B2Apr 8, 2025

Apparatus and methods for determining fluid dynamics of liquid film on wafer surface

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47
US10269557B2Apr 23, 2019

Apparatus of processing semiconductor substrate

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations46
US11031266B2Jun 8, 2021

Wafer handling equipment and method thereof

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations43

TAIWAN SEMICONDUCTOR MFG

7 patents