Inventor
NGUYEN HUONG THANH
US10 patents
Patents
10 patentsUS6939434B2Sep 6, 2005
Externally excited torroidal plasma source with magnetic control of ion distribution
APPLIED MATERIALS INC72 citations98
US6569257B1May 27, 2003
Method for cleaning a process chamber
APPLIED MATERIALS INC86 citations98
US6258735B1Jul 10, 2001
Method for using bypass lines to stabilize gas flow and maintain plasma inside a deposition chamber
APPLIED MATERIALS INC84 citations97
US7244672B2Jul 17, 2007
Selective etching of organosilicate films over silicon oxide stop etch layers
APPLIED MATERIALS INC36 citations92
US6680164B2Jan 20, 2004
Solvent free photoresist strip and residue removal processing for post etching of low-k films
APPLIED MATERIALS INC42 citations92
US6521546B1Feb 18, 2003
Method of making a fluoro-organosilicate layer
APPLIED MATERIALS INC14 citations84
US7097716B2Aug 29, 2006
Method for performing fluorocarbon chamber cleaning to eliminate fluorine memory effect
APPLIED MATERIALS INC15 citations83
US6514850B2Feb 4, 2003
Interface with dielectric layer and method of making
APPLIED MATERIALS INC9 citations74
US6511920B2Jan 28, 2003
Optical marker layer for etch endpoint determination
APPLIED MATERIALS INC5 citations63
US7183201B2Feb 27, 2007
Selective etching of organosilicate films over silicon oxide stop etch layers
APPLIED MATERIALS INC1 citations51