Inventor
SAADATMAND KOUROSH
US17 patents
⚠️ This page may combine multiple inventors who share the name “SAADATMAND KOUROSH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AXCELIS TECH INC
6 patentsUS6635890B2Oct 21, 2003
Slit double gap buncher and method for improved ion bunching in an ion implantation system
AXCELIS TECH INC31 citations92
US6208095B1Mar 27, 2001
Compact helical resonator coil for ion implanter linear accelerator
AXCELIS TECH INC37 citations90
US6653643B2Nov 25, 2003
Method and apparatus for improved ion acceleration in an ion implantation system
AXCELIS TECH INC17 citations83
US6583429B2Jun 24, 2003
Method and apparatus for improved ion bunching in an ion implantation system
AXCELIS TECH INC12 citations73
US6653803B1Nov 25, 2003
Integrated resonator and amplifier system
AXCELIS TECH INC10 citations72
US7267520B2Sep 11, 2007
Wafer scanning system with reciprocating rotary motion utilizing springs and counterweights
AXCELIS TECH INC5 citations62
ADVANCED ION BEAM TECH INC
5 patentsUS9281162B2Mar 8, 2016
Single bend energy filter for controlling deflection of charged particle beam
ADVANCED ION BEAM TECH INC8 citations83
US9697988B2Jul 4, 2017
Ion implantation system and process
ADVANCED ION BEAM TECH INC2 citations73
US9431247B2Aug 30, 2016
Method for ion implantation
ADVANCED ION BEAM TECH INC1 citations48
US9269528B2Feb 23, 2016
Medium current ribbon beam for ion implantation
ADVANCED ION BEAM TECH INC1 citations47
US9748072B2Aug 29, 2017
Lower dose rate ion implantation using a wider ion beam
ADVANCED ION BEAM TECH INC0 citations37