Inventor
STOECKGEN UWE GUNTER
DE4 patents
Patents
4 patentsUS6699107B2Mar 2, 2004
Polishing head and apparatus with an improved pad conditioner for chemical mechanical polishing
ADVANCED MICRO DEVICES INC35 citations88
US7150675B2Dec 19, 2006
Method and system for controlling the chemical mechanical polishing by using a sensor signal of a pad conditioner
ADVANCED MICRO DEVICES INC15 citations77
US6752697B1Jun 22, 2004
Apparatus and method for chemical mechanical polishing of a substrate
ADVANCED MICRO DEVICES INC8 citations71
US7476552B2Jan 13, 2009
Method of reworking a semiconductor structure
ADVANCED MICRO DEVICES INC0 citations50