Inventor
MARXSEN GERD FRANZ CHRISTIAN
DE3 patents
Patents
3 patentsUS6595830B1Jul 22, 2003
Method of controlling chemical mechanical polishing operations to control erosion of insulating materials
ADVANCED MICRO DEVICES INC26 citations91
US6699107B2Mar 2, 2004
Polishing head and apparatus with an improved pad conditioner for chemical mechanical polishing
ADVANCED MICRO DEVICES INC35 citations88
US6746958B1Jun 8, 2004
Method of controlling the duration of an endpoint polishing process in a multistage polishing process
ADVANCED MICRO DEVICES INC19 citations82