Inventor
LEBEL RICHARD JOHN
US4 patents
Patents
4 patentsUS6022266AFeb 8, 2000
In-situ pad conditioning process for CMP
IBM76 citations91
US6567172B1May 20, 2003
System and multipass probe for optical interference measurements
IBM7 citations72
US5849629ADec 15, 1998
Method of forming a low stress polycide conductors on a semiconductor chip
IBM5 citations55
US6738142B2May 18, 2004
Integrated wafer cassette metrology assembly
IBM0 citations44