Inventor
HOU TSU-KUANG
TW2 patents
Patents
2 patentsUS6860138B1Mar 1, 2005
Real-time detection mechanism with self-calibrated steps for the hardware baseline to detect the malfunction of liquid vaporization system in AMAT TEOS-based Dxz chamber
TAIWAN SEMICONDUCTOR MFG5 citations53
US7029928B2Apr 18, 2006
Real-time detection mechanism with self-calibrated steps for the hardware baseline to detect the malfunction of liquid vaporization system in AMAT TEOS-based Dxz chamber
TAIWAN SEMICONDUCTOR MFG0 citations42