Inventor

FAWCETT CLYDE A

US2 patents

Patents

2 patents

US6899602B2May 31, 2005

Porous polyurethane polishing pads

ROHM & HAAS ELECT MAT28 citations86

US7569268B2Aug 4, 2009

Chemical mechanical polishing pad

ROHM & HAAS ELECT MAT2 citations58