Inventor
CRKVENAC T TODD
US4 patents
Patents
4 patentsUS7252871B2Aug 7, 2007
Polishing pad having a pressure relief channel
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US6899602B2May 31, 2005
Porous polyurethane polishing pads
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US6843709B1Jan 18, 2005
Chemical mechanical polishing method for reducing slurry reflux
ROHM & HAAS ELECT MAT13 citations82
US7569268B2Aug 4, 2009
Chemical mechanical polishing pad
ROHM & HAAS ELECT MAT2 citations58