Inventor
FURIHATA JUNICHIRO
JP2 patents
Patents
2 patentsUS6902988B2Jun 7, 2005
Method for treating substrates for microelectronics and substrates obtained by said method
SOITEC SILICON ON INSULATOR20 citations91
US7235427B2Jun 26, 2007
Method for treating substrates for microelectronics and substrates obtained by said method
SOITEC SILICON ON INSULATOR3 citations61