Inventor

HANAZAKI MINORU

JP18 patents

⚠️ This page may combine multiple inventors who share the name “HANAZAKI MINORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HANAZAKI MINORU

MITSUBISHI ELECTRIC CORP

Plasma processing method and plasma processing apparatus

Apparatus for uniformly distributing plasma over a substrate

Magnetically enhanced microwave plasma generating apparatus

Plasma processing apparatus capable of reliably, electrostatically attracting and holding and thus fixing semiconductor wafer

Plasma processor

Plasma generating apparatus with multiple microwave introducing means

Etching apparatus, etching method, manufacturing method of a semiconductor device, and semiconductor device

Semiconductor manufacturing device and method of removing particles therefrom

Wafer processing apparatus

MARUO CALCIUM

Fine particles of petaloid porous hydroxyapatite and process for producing the same

Method for manufacturing monodisperse vaterite type calcium carbonate

Monodisperse vaterite type calcium carbonate, its manufacturing method and method of controlling growth of particles and shape thereof

Filler for paper-making and neutral paper-making process by the use thereof

Additive for synthetic resins and synthetic resin compositions

Additive for synthetic resins and a synthetic resin composition

RENESAS TECH CORP

Plasma processing apparatus capable of evaluating process performance

Gas analyzing method and gas analyzer for semiconductor treater

Manufacturing method of semiconductor integrated circuit device