Inventor

NOGUCHI TOSHIHIKO

JP6 patents

⚠️ This page may combine multiple inventors who share the name “NOGUCHI TOSHIHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MITSUBISHI ELECTRIC CORP

3 patents

US5534073AJul 9, 1996

Semiconductor producing apparatus comprising wafer vacuum chucking device

MITSUBISHI ELECTRIC CORP213 citations98

US5976260ANov 2, 1999

Semiconductor producing apparatus, and wafer vacuum chucking device, gas cleaning method and nitride film forming method in semiconductor producing apparatus

MITSUBISHI ELECTRIC CORP48 citations95

US5196034AMar 23, 1993

Semiconductor wafer cleaning apparatus

MITSUBISHI ELECTRIC CORP9 citations73

RENESAS TECH CORP

3 patents

US6929712B2Aug 16, 2005

Plasma processing apparatus capable of evaluating process performance

RENESAS TECH CORP24 citations89

US6768542B2Jul 27, 2004

Defect inspecting device for substrate to be processed and method of manufacturing semiconductor device

RENESAS TECH CORP18 citations81

US6648128B2Nov 18, 2003

Conveyor, method for conveying a semiconductor wafer, and method for manufacturing a semiconductor device

RENESAS TECH CORP8 citations72