Inventor
KOMEMURA TOSHIO
JP8 patents
⚠️ This page may combine multiple inventors who share the name “KOMEMURA TOSHIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
4 patentsUS6054016AApr 25, 2000
Magnetically enhanced microwave plasma generating apparatus
MITSUBISHI ELECTRIC CORP61 citations94
US6109208AAug 29, 2000
Plasma generating apparatus with multiple microwave introducing means
MITSUBISHI ELECTRIC CORP50 citations91
US6347655B1Feb 19, 2002
Die bonding device and semiconductor device
MITSUBISHI ELECTRIC CORP20 citations90
US4775085AOct 4, 1988
Semiconductor wafer breaking apparatus
MITSUBISHI ELECTRIC CORP18 citations73
RENESAS TECH CORP
3 patentsUS6929712B2Aug 16, 2005
Plasma processing apparatus capable of evaluating process performance
RENESAS TECH CORP24 citations89
US6768542B2Jul 27, 2004
Defect inspecting device for substrate to be processed and method of manufacturing semiconductor device
RENESAS TECH CORP18 citations81
US6648128B2Nov 18, 2003
Conveyor, method for conveying a semiconductor wafer, and method for manufacturing a semiconductor device
RENESAS TECH CORP8 citations72