P

Inventor

TUDA MUTUMI

JP5 patents
⚠️ This page may combine multiple inventors who share the name “TUDA MUTUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MITSUBISHI ELECTRIC CORP

4 patents
US6054016AApr 25, 2000

Magnetically enhanced microwave plasma generating apparatus

MITSUBISHI ELECTRIC CORP61 citations94
US6109208AAug 29, 2000

Plasma generating apparatus with multiple microwave introducing means

MITSUBISHI ELECTRIC CORP50 citations91
US6335595B1Jan 1, 2002

Plasma generating apparatus

MITSUBISHI ELECTRIC CORP10 citations72
US6651678B2Nov 25, 2003

Method of manufacturing semiconductor device

MITSUBISHI ELECTRIC CORP6 citations60

RENESAS TECH CORP

1 patent
US6929712B2Aug 16, 2005

Plasma processing apparatus capable of evaluating process performance

RENESAS TECH CORP24 citations89