Inventor
MATSUYA MIYUKI
JP7 patents
Patents
7 patentsUS6924488B2Aug 2, 2005
Charged-particle beam apparatus equipped with aberration corrector
JEOL LTD33 citations91
US6723997B2Apr 20, 2004
Aberration corrector for instrument utilizing charged-particle beam
JEOL LTD36 citations91
US7015481B2Mar 21, 2006
Charged-particle optical system
JEOL LTD23 citations90
US6852983B2Feb 8, 2005
Charged-particle beam apparatus equipped with aberration corrector
JEOL LTD23 citations90
US5225676AJul 6, 1993
Electrooptical viewing apparatus capable of switching depth of focus
JEOL LTD25 citations90
US6930312B2Aug 16, 2005
Charged-particle beam instrument and method of correcting aberration therein
JEOL LTD9 citations71
US6933512B2Aug 23, 2005
Charged particle beam instrument
JEOL LTD5 citations60