Inventor
SCHENK HARALD
DE32 patents
⚠️ This page may combine multiple inventors who share the name “SCHENK HARALD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FRAUNHOFER GES FORSCHUNG
23 patentsUS7078778B2Jul 18, 2006
Micromechanical device
FRAUNHOFER GES FORSCHUNG27 citations92
US6595055B1Jul 22, 2003
Micromechanical component comprising an oscillating body
FRAUNHOFER GES FORSCHUNG32 citations92
US7466474B2Dec 16, 2008
Micromechanical device with tilted electrodes
FRAUNHOFER GES FORSCHUNG13 citations82
US10457544B2Oct 29, 2019
MEMS transducer for interacting with a volume flow of a fluid and method for manufacturing the same
FRAUNHOFER GES FORSCHUNG12 citations80
US9164277B2Oct 20, 2015
Micromechanical device
FRAUNHOFER GES FORSCHUNG13 citations78
US7059189B2Jun 13, 2006
Acceleration sensor and method for detecting an acceleration
FRAUNHOFER GES FORSCHUNG7 citations73
US10483876B2Nov 19, 2019
Electrostatically deflectable micromechanical device
FRAUNHOFER GES FORSCHUNG4 citations71
US9250367B2Feb 2, 2016
Fluidic variable focal length optical lens and method for manufacturing the same
FRAUNHOFER GES FORSCHUNG4 citations65
US7977897B2Jul 12, 2011
Apparatus and method for controlling or regulating an oscillating deflectable micromechanical element
FRAUNHOFER GES FORSCHUNG6 citations63
US11554950B2Jan 17, 2023
MEMS transducer for interacting with a volume flow of a fluid, and method of producing same
FRAUNHOFER GES FORSCHUNG0 citations62
US7760414B2Jul 20, 2010
Optical device comprising a structure for avoiding reflections
FRAUNHOFER GES FORSCHUNG4 citations62
US7027152B2Apr 11, 2006
Spectrometer
FRAUNHOFER GES FORSCHUNG4 citations62
US7940439B2May 10, 2011
Method for generating a micromechanical structure
FRAUNHOFER GES FORSCHUNG3 citations61
US7932788B2Apr 26, 2011
Oscillating, deflectable micromechanical element and method for use thereof
FRAUNHOFER GES FORSCHUNG3 citations61
US7847997B2Dec 7, 2010
Projection apparatus for scanningly projection
FRAUNHOFER GES FORSCHUNG5 citations59
US10365244B2Jul 30, 2019
Ion-sensitive structure and method for producing the same
FRAUNHOFER GES FORSCHUNG0 citations51
US7951635B2May 31, 2011
Method for the compensation of deviations occurring as a result of manufacture in the manufacture of micromechanical elements and their use
FRAUNHOFER GES FORSCHUNG1 citations51
US7301690B2Nov 27, 2007
Micro-optical arrangement
FRAUNHOFER GES FORSCHUNG1 citations51
US7034936B2Apr 25, 2006
Spectrometer
FRAUNHOFER GES FORSCHUNG0 citations51
US11639718B2May 2, 2023
Micromechanical devices with mechanical actuators
FRAUNHOFER GES FORSCHUNG0 citations45
US7490947B2Feb 17, 2009
Microoptic reflecting component
FRAUNHOFER GES FORSCHUNG0 citations45
US7518770B2Apr 14, 2009
Apparatus and method for projecting images and/or processing materials
FRAUNHOFER GES FORSCHUNG0 citations42
US9893491B2Feb 13, 2018
Microelectromechanical system for tuning lasers
FRAUNHOFER GES FORSCHUNG0 citations33