Inventor
LI YUZHUO
US36 patents
⚠️ This page may combine multiple inventors who share the name “LI YUZHUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BASF SE
7 patentsUS10647900B2May 12, 2020
Chemical-mechanical polishing composition comprising benzotriazole derivatives as corrosion inhibitors
BASF SE3 citations72
US9777192B2Oct 3, 2017
Chemical mechanical polishing (CMP) composition comprising a protein
BASF SE3 citations71
US11168239B2Nov 9, 2021
Chemical-mechanical polishing composition comprising benzotriazole derivatives as corrosion inhibitors
BASF SE0 citations61
US9458415B2Oct 4, 2016
Post chemical-mechanical-polishing (post-CMP) cleaning composition comprising a specific sulfur-containing compound and a sugar alcohol or a polycarboxylic acid
BASF SE2 citations60
US8980750B2Mar 17, 2015
Chemical mechanical polishing (CMP) composition comprising a non-ionic surfactant and a carbonate salt
BASF SE2 citations59
US10214663B2Feb 26, 2019
Chemical-mechanical polishing composition comprising organic/inorganic composite particles
BASF SE0 citations49
US9416298B2Aug 16, 2016
Process for the manufacture of semiconductor devices comprising the chemical mechanical polishing (CMP) of III-V material in the presence of a CMP composition comprising a specific non-ionic surfactant
BASF SE0 citations46
RAMAN VIJAY IMMANUEL
7 patentsUS8679980B2Mar 25, 2014
Aqueous metal polishing agent comprising a polymeric abrasiv containing pendant functional groups and its use in a CMP process
RAMAN VIJAY IMMANUEL6 citations70
US10392531B2Aug 27, 2019
Process for removing a bulk material layer from a substrate and a chemical mechanical polishing agent suitable for this process
RAMAN VIJAY IMMANUEL2 citations69
US9487675B2Nov 8, 2016
Chemical mechanical polishing composition comprising polyvinyl phosphonic acid and its derivatives
RAMAN VIJAY IMMANUEL3 citations69
US9070632B2Jun 30, 2015
Aqueous polishing composition and process for chemically mechanically polishing substrates having patterned or unpatterned low-k dielectric layers
RAMAN VIJAY IMMANUEL1 citations47
US9028708B2May 12, 2015
Process for removing a bulk material layer from a substrate and a chemical mechanical polishing agent suitable for this process
RAMAN VIJAY IMMANUEL0 citations47
US9005472B2Apr 14, 2015
Aqueous polishing agent and graft copolymers and their use in a process for polishing patterned and unstructured metal surfaces
RAMAN VIJAY IMMANUEL0 citations39
US8747687B2Jun 10, 2014
Aqueous polishing agent comprising solid polymer particles and two complexing agents and its use in a process for polishing patterned and unstructured metal surfaces
RAMAN VIJAY IMMANUEL0 citations38
LI YUZHUO
4 patentsUS9487674B2Nov 8, 2016
Chemical mechanical polishing (CMP) composition comprising a glycoside
LI YUZHUO0 citations50
US8597539B2Dec 3, 2013
Chemical mechanical polishing (CMP) polishing solution with enhanced performance
LI YUZHUO2 citations48
US8684793B2Apr 1, 2014
Oxidizing particles based slurry for nobel metal including ruthenium chemical mechanical planarization
LI YUZHUO1 citations45
US9496146B2Nov 15, 2016
Method for forming through-base wafer vias
LI YUZHUO0 citations30
GEN ELECTRIC
2 patentsPPG IND OHIO INC
2 patentsFERRO CORP
2 patentsDYNEA CHEMICALS OY
2 patentsNOLLER BASTIAN MARTEN
2 patentsUS9443739B2Sep 13, 2016
Process for the manufacture of semiconductor devices comprising the chemical mechanical polishing of elemental germanium and/or Si1-xGex material in the presence of a CMP composition comprising a specific organic compound
NOLLER BASTIAN MARTEN2 citations49
US10407594B2Sep 10, 2019
Chemical mechanical polishing (CMP) composition comprising a polymeric polyamine
NOLLER BASTIAN MARTEN0 citations33