Inventor
PAN SHAOHER X
US60 patents
⚠️ This page may combine multiple inventors who share the name “PAN SHAOHER X”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SPATIAL PHOTONICS INC
22 patentsUS7167298B2Jan 23, 2007
High contrast spatial light modulator and method
SPATIAL PHOTONICS INC64 citations98
US7307777B2Dec 11, 2007
High-resolution spatial light modulation
SPATIAL PHOTONICS INC31 citations93
US7245415B2Jul 17, 2007
High contrast spatial light modulator
SPATIAL PHOTONICS INC29 citations93
US7586669B2Sep 8, 2009
Non-contact micro mirrors
SPATIAL PHOTONICS INC8 citations84
US7483200B1Jan 27, 2009
Multiple stop micro-mirror array display
SPATIAL PHOTONICS INC17 citations84
US7471445B2Dec 30, 2008
Fast-response micro-mechanical devices
SPATIAL PHOTONICS INC9 citations84
US7388708B2Jun 17, 2008
Spatial light modulator multi-layer mirror plate
SPATIAL PHOTONICS INC12 citations84
US7428092B2Sep 23, 2008
Fast-response micro-mechanical devices
SPATIAL PHOTONICS INC9 citations82
US7538932B2May 26, 2009
High contrast spatial light modulator
SPATIAL PHOTONICS INC5 citations74
US7471440B2Dec 30, 2008
Fabricating micro devices using sacrificial materials
SPATIAL PHOTONICS INC7 citations74
US7405862B2Jul 29, 2008
Spatial light modulator having a cantilever anti-stiction mechanism
SPATIAL PHOTONICS INC7 citations74
US7394586B2Jul 1, 2008
Spatial light modulator
SPATIAL PHOTONICS INC6 citations74
US7416908B2Aug 26, 2008
Method for fabricating a micro structure
SPATIAL PHOTONICS INC8 citations72
US7763962B2Jul 27, 2010
Wafer-level packaging of micro devices
SPATIAL PHOTONICS INC5 citations63
US7538922B2May 26, 2009
Encapsulated spatial light modulator having improved performance
SPATIAL PHOTONICS INC2 citations63
US7508569B2Mar 24, 2009
Low voltage micro mechanical device
SPATIAL PHOTONICS INC3 citations63
US7468830B2Dec 23, 2008
In SITU application of anti-stiction materials to micro devices
SPATIAL PHOTONICS INC4 citations63
US7423798B2Sep 9, 2008
Addressing circuit and method for bi-directional micro-mirror array
SPATIAL PHOTONICS INC3 citations63
US7391554B2Jun 24, 2008
High fill-ratio mirror-based spatial light modulator
SPATIAL PHOTONICS INC3 citations63
US7388707B2Jun 17, 2008
High-resolution spatial light modulation
SPATIAL PHOTONICS INC5 citations63
US7821010B2Oct 26, 2010
Low temperature fabrication of conductive micro structures
SPATIAL PHOTONICS INC5 citations62
US7709940B2May 4, 2010
Micro device encapsulation
SPATIAL PHOTONICS INC6 citations54
APPLIED MATERIALS INC
10 patentsUS6679981B1Jan 20, 2004
Inductive plasma loop enhancing magnetron sputtering
APPLIED MATERIALS INC329 citations99
US6527968B1Mar 4, 2003
Two-stage self-cleaning silicon etch process
APPLIED MATERIALS INC268 citations99
US6699399B1Mar 2, 2004
Self-cleaning etch process
APPLIED MATERIALS INC500 citations98
US6136211AOct 24, 2000
Self-cleaning etch process
APPLIED MATERIALS INC160 citations98
US6129807AOct 10, 2000
Apparatus for monitoring processing of a substrate
APPLIED MATERIALS INC78 citations96
US5907820AMay 25, 1999
System for acquiring and analyzing a two-dimensional array of data
APPLIED MATERIALS INC83 citations96
US5775808AJul 7, 1998
Apparatus for real-time, in situ measurement of temperature and a method of fabricating and using same
APPLIED MATERIALS INC64 citations96
US7632419B1Dec 15, 2009
Apparatus and method for monitoring processing of a substrate
APPLIED MATERIALS INC30 citations92
US5801386ASep 1, 1998
Apparatus for measuring plasma characteristics within a semiconductor wafer processing system and a method of fabricating and using same
APPLIED MATERIALS INC36 citations92
US5718795AFeb 17, 1998
Radial magnetic field enhancement for plasma processing
APPLIED MATERIALS INC48 citations92
PAN SHAOHER X
9 patentsUS8507297B2Aug 13, 2013
Packaging and testing of multiple MEMS devices on a wafer
PAN SHAOHER X38 citations94
US8674383B2Mar 18, 2014
Solid state lighting device on a conductive substrate
PAN SHAOHER X21 citations92
US8313963B2Nov 20, 2012
Light emitting device
PAN SHAOHER X16 citations92
US8217418B1Jul 10, 2012
Semi-polar semiconductor light emission devices
PAN SHAOHER X29 citations91
US8304794B2Nov 6, 2012
Light emitting device
PAN SHAOHER X13 citations84
US8268648B2Sep 18, 2012
Silicon based solid state lighting
PAN SHAOHER X10 citations84
US8722441B2May 13, 2014
Manufacturing process for solid state lighting device on a conductive substrate
PAN SHAOHER X16 citations83
US8283676B2Oct 9, 2012
Manufacturing process for solid state lighting device on a conductive substrate
PAN SHAOHER X7 citations83
US8624292B2Jan 7, 2014
Non-polar semiconductor light emission devices
PAN SHAOHER X15 citations81
MIRADIA INC
6 patentsUS7034984B2Apr 25, 2006
Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge
MIRADIA INC68 citations98
US6992810B2Jan 31, 2006
High fill ratio reflective spatial light modulator with hidden hinge
MIRADIA INC87 citations98
US7245416B2Jul 17, 2007
Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge
MIRADIA INC13 citations93
US7022245B2Apr 4, 2006
Fabrication of a reflective spatial light modulator
MIRADIA INC23 citations93
US7118234B2Oct 10, 2006
Reflective spatial light modulator
MIRADIA INC15 citations92
US7092140B2Aug 15, 2006
Architecture of a reflective spatial light modulator
MIRADIA INC18 citations84
(unassigned)
2 patentsSIPHOTON INC
1 patentShowing the top 50 of 60 patents by PatentIndex Score.