Inventor
VAN DE PASCH ENGELBERTUS A F
NL3 patents
Patents
3 patentsUS7397940B2Jul 8, 2008
Object positioning method for a lithographic projection apparatus
ASML NETHERLANDS BV20 citations88
US6498350B2Dec 24, 2002
Crash prevention in positioning apparatus for use in lithographic projection apparatus
ASML NETHERLANDS BV32 citations88
US6392738B1May 21, 2002
Lithographic projection apparatus
ASML NETHERLANDS BV59 citations87