Inventor
CASTENMILLER THOMAS J M
NL6 patents
⚠️ This page may combine multiple inventors who share the name “CASTENMILLER THOMAS J M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
5 patentsUS6674510B1Jan 6, 2004
Off-axis levelling in lithographic projection apparatus
ASML NETHERLANDS BV192 citations95
US7019815B2Mar 28, 2006
Off-axis leveling in lithographic projection apparatus
ASML NETHERLANDS BV19 citations89
US7397940B2Jul 8, 2008
Object positioning method for a lithographic projection apparatus
ASML NETHERLANDS BV20 citations88
US6894261B2May 17, 2005
Position measuring system for use in lithographic apparatus
ASML NETHERLANDS BV12 citations79
US6875992B2Apr 5, 2005
Position measuring device, position measuring system, lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV15 citations79