Inventor
ARIENS ANDREAS B G
NL4 patents
Patents
4 patentsUS7397940B2Jul 8, 2008
Object positioning method for a lithographic projection apparatus
ASML NETHERLANDS BV20 citations88
US6498350B2Dec 24, 2002
Crash prevention in positioning apparatus for use in lithographic projection apparatus
ASML NETHERLANDS BV32 citations88
US6894261B2May 17, 2005
Position measuring system for use in lithographic apparatus
ASML NETHERLANDS BV12 citations79
US6875992B2Apr 5, 2005
Position measuring device, position measuring system, lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV15 citations79