Inventor
PLUG REINDER TEUN
NL12 patents
⚠️ This page may combine multiple inventors who share the name “PLUG REINDER TEUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
11 patentsUS7502103B2Mar 10, 2009
Metrology tool, system comprising a lithographic apparatus and a metrology tool, and a method for determining a parameter of a substrate
ASML NETHERLANDS BV18 citations92
US7480050B2Jan 20, 2009
Lithographic system, sensor, and method of measuring properties of a substrate
ASML NETHERLANDS BV13 citations83
US7511797B2Mar 31, 2009
Lithography system, control system and device manufacturing method
ASML NETHERLANDS BV9 citations82
US7352439B2Apr 1, 2008
Lithography system, control system and device manufacturing method
ASML NETHERLANDS BV10 citations81
US7586598B2Sep 8, 2009
Metrology tool, system comprising a lithographic apparatus and a metrology tool, and a method for determining a parameter of a substrate
ASML NETHERLANDS BV7 citations73
US7659988B2Feb 9, 2010
Apparatus for angular-resolved spectroscopic lithography characterization and device manufacturing method
ASML NETHERLANDS BV7 citations71
US10884342B2Jan 5, 2021
Method and apparatus for predicting performance of a metrology system
ASML NETHERLANDS BV2 citations69
US7961309B2Jun 14, 2011
Metrology tool, system comprising a lithographic apparatus and a metrology tool, and a method for determining a parameter of a substrate
ASML NETHERLANDS BV4 citations62
US7113253B2Sep 26, 2006
Method, apparatus and computer product for substrate processing
ASML NETHERLANDS BV2 citations61
US11287748B2Mar 29, 2022
Guided patterning device inspection
ASML NETHERLANDS BV0 citations58
US7679714B2Mar 16, 2010
Lithographic apparatus, combination of lithographic apparatus and processing module, and device manufacturing method
ASML NETHERLANDS BV0 citations49