Inventor
PAN YAOLING
US41 patents
⚠️ This page may combine multiple inventors who share the name “PAN YAOLING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NANOSYS INC
16 patentsUS7105428B2Sep 12, 2006
Systems and methods for nanowire growth and harvesting
NANOSYS INC197 citations98
US7091120B2Aug 15, 2006
System and process for producing nanowire composites and electronic substrates therefrom
NANOSYS INC70 citations98
US7115971B2Oct 3, 2006
Nanowire varactor diode and methods of making same
NANOSYS INC95 citations97
US7473943B2Jan 6, 2009
Gate configuration for nanowire electronic devices
NANOSYS INC47 citations96
US7339184B2Mar 4, 2008
Systems and methods for harvesting and integrating nanowires
NANOSYS INC40 citations96
US7795125B2Sep 14, 2010
System and process for producing nanowire composites and electronic substrates therefrom
NANOSYS INC13 citations93
US7569503B2Aug 4, 2009
Contact doping and annealing systems and processes for nanowire thin films
NANOSYS INC22 citations93
US7468315B2Dec 23, 2008
System and process for producing nanowire composites and electronic substrates therefrom
NANOSYS INC16 citations93
US7871870B2Jan 18, 2011
Method of fabricating gate configurations for an improved contacts in nanowire based electronic devices
NANOSYS INC24 citations92
US7786024B2Aug 31, 2010
Selective processing of semiconductor nanowires by polarized visible radiation
NANOSYS INC33 citations92
US7701014B2Apr 20, 2010
Gating configurations and improved contacts in nanowire-based electronic devices
NANOSYS INC23 citations92
US7667296B2Feb 23, 2010
Nanowire capacitor and methods of making same
NANOSYS INC18 citations92
US7273732B2Sep 25, 2007
Systems and methods for nanowire growth and harvesting
NANOSYS INC22 citations92
US7951422B2May 31, 2011
Methods for oriented growth of nanowires on patterned substrates
NANOSYS INC23 citations91
US7741197B1Jun 22, 2010
Systems and methods for harvesting and reducing contamination in nanowires
NANOSYS INC35 citations91
US7345307B2Mar 18, 2008
Fully integrated organic layered processes for making plastic electronics based on conductive polymers and semiconductor nanowires
NANOSYS INC16 citations84
APPLIED MATERIALS INC
12 patentsUS12009236B2Jun 11, 2024
Sensors and system for in-situ edge ring erosion monitor
APPLIED MATERIALS INC3 citations73
US11781214B2Oct 10, 2023
Differential capacitive sensors for in-situ film thickness and dielectric constant measurement
APPLIED MATERIALS INC2 citations70
US12228534B2Feb 18, 2025
Capacitive sensor for monitoring gas concentration
APPLIED MATERIALS INC0 citations61
US11959868B2Apr 16, 2024
Capacitive sensor for monitoring gas concentration
APPLIED MATERIALS INC0 citations61
US12163911B2Dec 10, 2024
Capacitive sensor housing for chamber condition monitoring
APPLIED MATERIALS INC0 citations60
US11415538B2Aug 16, 2022
Capacitive sensor housing for chamber condition monitoring
APPLIED MATERIALS INC0 citations60
US12123090B2Oct 22, 2024
Differential capacitive sensor for in-situ film thickness and dielectric constant measurement
APPLIED MATERIALS INC0 citations59
US12537179B2Jan 27, 2026
Capacitive sensing data integration for plasma chamber condition monitoring
APPLIED MATERIALS INC0 citations57
US11545346B2Jan 3, 2023
Capacitive sensing data integration for plasma chamber condition monitoring
APPLIED MATERIALS INC0 citations57
US12437979B2Oct 7, 2025
Capacitive sensors and capacitive sensing locations for plasma chamber condition monitoring
APPLIED MATERIALS INC0 citations51
US11551905B2Jan 10, 2023
Resonant process monitor
APPLIED MATERIALS INC0 citations50
US11581206B2Feb 14, 2023
Capacitive sensor for chamber condition monitoring
APPLIED MATERIALS INC0 citations49
OBSIDIAN SENSORS INC
6 patentsUS11685649B2Jun 27, 2023
Capping plate for panel scale packaging of MEMS products
OBSIDIAN SENSORS INC0 citations62
US12522498B2Jan 13, 2026
MEMS and NEMS structures
OBSIDIAN SENSORS INC0 citations61
US12006209B2Jun 11, 2024
MEMS and NEMS structures
OBSIDIAN SENSORS INC0 citations61
US11282760B2Mar 22, 2022
Integrated packaging devices and methods with backside interconnections
OBSIDIAN SENSORS INC0 citations61
US10453766B2Oct 22, 2019
Integrated packaging devices and methods with backside interconnections
OBSIDIAN SENSORS INC1 citations61
US10150667B2Dec 11, 2018
Panel level packaging for MEMS application
OBSIDIAN SENSORS INC0 citations40