Inventor

SIMONS HUBERTUS JOHANNES GERTRUDUS

NL17 patents

⚠️ This page may combine multiple inventors who share the name “SIMONS HUBERTUS JOHANNES GERTRUDUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SIMONS HUBERTUS JOHANNES GERTRUDUS

ASML NETHERLANDS BV

Alignment systems and methods for lithographic systems

Lithographic apparatus and device manufacturing method

Method of applying a pattern to a substrate, device manufacturing method and lithographic apparatus for use in such methods

Method and apparatus for inspection and metrology

Lithographic apparatus and device manufacturing method

Inspection method and apparatus and lithographic processing cell

Inspection method and apparatus and lithographic processing cell

Inspection method and apparatus and lithographic processing cell

Device manufacturing method

Inspection method and apparatus, and lithographic apparatus

MOS EVERHARDUS CORNELIS

Alignment system, lithographic system and method

Lithographic apparatus, device manufacturing method and device for correcting overlay errors between overlapping patterns

Process, apparatus, and device for determining intra-field correction to correct overlay errors between overlapping patterns

Method for selecting sample positions on a substrate, method for providing a representation of a model of properties of a substrate, method of providing a representation of the variation of properties of a substrate across the substrate and device manufacturing method

VAN DER SANDEN STEFAN CORNELIS THEODORUS

Method of applying a pattern to a substrate, device manufacturing method and lithographic apparatus for use in such methods

VAN BILSEN FRANCISCUS BERNARDUS MARIA

Alignment systems and methods for lithographic systems

ASML NETHERLANDS N V

Alignment mark deformation estimating method, substrate position predicting method, alignment system and lithographic apparatus