Inventor
MUKUTI NDANKA O
US6 patents
Patents
6 patentsUS7589336B2Sep 15, 2009
Apparatus and method for exposing a substrate to UV radiation while monitoring deterioration of the UV source and reflectors
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US7074298B2Jul 11, 2006
High density plasma CVD chamber
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US11956883B2Apr 9, 2024
Methods and apparatus for controlling RF parameters at multiple frequencies
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US11570879B2Jan 31, 2023
Methods and apparatus for controlling RF parameters at multiple frequencies
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US10276353B2Apr 30, 2019
Dual-channel showerhead for formation of film stacks
APPLIED MATERIALS INC4 citations71
US7554103B2Jun 30, 2009
Increased tool utilization/reduction in MWBC for UV curing chamber
APPLIED MATERIALS INC5 citations62