Inventor
MORISHIGE YOSHIO
JP22 patents
⚠️ This page may combine multiple inventors who share the name “MORISHIGE YOSHIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
8 patentsUS6411377B1Jun 25, 2002
Optical apparatus for defect and particle size inspection
HITACHI LTD174 citations99
US7940383B2May 10, 2011
Method of detecting defects on an object
HITACHI LTD42 citations95
US7417723B2Aug 26, 2008
Method of inspecting a semiconductor device and an apparatus thereof
HITACHI LTD10 citations93
US7692779B2Apr 6, 2010
Apparatus and method for testing defects
HITACHI LTD12 citations92
US7639350B2Dec 29, 2009
Apparatus and method for testing defects
HITACHI LTD25 citations92
US7443496B2Oct 28, 2008
Apparatus and method for testing defects
HITACHI LTD16 citations92
US7643138B2Jan 5, 2010
Method of inspecting a semiconductor device and an apparatus thereof
HITACHI LTD5 citations74
US8040503B2Oct 18, 2011
Method of inspecting a semiconductor device and an apparatus thereof
HITACHI LTD2 citations63
HITACHI HIGH TECH CORP
5 patentsUS7098055B2Aug 29, 2006
Apparatus and method for testing defects
HITACHI HIGH TECH CORP36 citations96
US7037735B2May 2, 2006
Apparatus and method for testing defects
HITACHI HIGH TECH CORP43 citations96
US7061602B2Jun 13, 2006
Method of inspecting a semiconductor device and an apparatus thereof
HITACHI HIGH TECH CORP18 citations93
US7719671B2May 18, 2010
Foreign matter inspection method and foreign matter inspection apparatus
HITACHI HIGH TECH CORP3 citations62
US7986405B2Jul 26, 2011
Foreign matter inspection method and foreign matter inspection apparatus
HITACHI HIGH TECH CORP0 citations51
HITACHI ELECTR ENG
5 patentsUS5694214ADec 2, 1997
Surface inspection method and apparatus
HITACHI ELECTR ENG86 citations96
US5880828AMar 9, 1999
Surface defect inspection device and shading correction method therefor
HITACHI ELECTR ENG36 citations92
US5818576AOct 6, 1998
Extraneous substance inspection apparatus for patterned wafer
HITACHI ELECTR ENG36 citations92
US5644393AJul 1, 1997
Extraneous substance inspection method and apparatus
HITACHI ELECTR ENG51 citations92
US5724132AMar 3, 1998
Extraneous substance inspection apparatus for patterned wafer
HITACHI ELECTR ENG4 citations63