Inventor
XU DENGFENG
US29 patents
⚠️ This page may combine multiple inventors who share the name “XU DENGFENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNIV TSINGHUA
9 patentsUS10532832B2Jan 14, 2020
Magnetic levitation reaction sphere
UNIV TSINGHUA2 citations71
US9903704B2Feb 27, 2018
Three-DOF heterodyne grating interferometer displacement measurement system
UNIV TSINGHUA2 citations71
US9879979B2Jan 30, 2018
Heterodyne grating interferometer displacement measurement system
UNIV TSINGHUA4 citations71
US12270645B2Apr 8, 2025
High-resolution phase detection method and system based on plane grating laser interferometer
UNIV TSINGHUA1 citations59
US9869857B2Jan 16, 2018
Optical grating phase modulator for laser interference photoetching system
UNIV TSINGHUA0 citations51
US9885556B2Feb 6, 2018
Dual-frequency grating interferometer displacement measurement system
UNIV TSINGHUA1 citations50
US9182217B2Nov 10, 2015
Method for measuring displacement of large-range moving platform
UNIV TSINGHUA0 citations41
US9310797B2Apr 12, 2016
Single degree of freedom vibration isolating device of linear motor and motion control method thereof
UNIV TSINGHUA0 citations39
US9995569B2Jun 12, 2018
Six-degree-of-freedom displacement measurement method for exposure region on silicon wafer stage
UNIV TSINGHUA0 citations38
ZHU YU
6 patentsUS8284380B2Oct 9, 2012
Dual-stage switching system for lithographic machine
ZHU YU2 citations62
US8084897B2Dec 27, 2011
Micro stage with 6 degrees of freedom
ZHU YU2 citations62
US9030648B2May 12, 2015
Dual wafer stage exchanging system for lithographic device
ZHU YU0 citations39
US8860927B2Oct 14, 2014
Dual-stage exchange system for lithographic apparatus
ZHU YU0 citations39
US8836918B2Sep 16, 2014
Dual-stage exchange system for lithographic apparatus
ZHU YU0 citations39
US9547245B2Jan 17, 2017
Dual wafer stage switching system for a lithography machine
ZHU YU0 citations37
SIMAX TECHNOLOGIES INC
4 patentsUS6884822B2Apr 26, 2005
Sol-gel process utilizing reduced mixing temperatures
SIMAX TECHNOLOGIES INC20 citations89
US7125912B2Oct 24, 2006
Doped sol-gel materials and method of manufacture utilizing reduced mixing temperatures
SIMAX TECHNOLOGIES INC9 citations70
US7026362B2Apr 11, 2006
Sol-gel process utilizing reduced mixing temperatures
SIMAX TECHNOLOGIES INC9 citations70
US7000885B2Feb 21, 2006
Apparatus and method for forming a sol-gel monolith utilizing multiple casting
SIMAX TECHNOLOGIES INC3 citations60
VARIAN INC
3 patentsSHANGHAI MICROELECTRONICS EQUI
3 patentsUS9752643B2Sep 5, 2017
Negative stiffness system for gravity compensation of micropositioner
SHANGHAI MICROELECTRONICS EQUI1 citations51
US9310782B2Apr 12, 2016
Method for measuring displacement of planar motor rotor
SHANGHAI MICROELECTRONICS EQUI0 citations40
US9766054B2Sep 19, 2017
Planar motor rotor displacement measuring device and its measuring method
SHANGHAI MICROELECTRONICS EQUI0 citations39
EDWARDS LIFESCIENCES CORP
2 patentsUS11590260B2Feb 28, 2023
Methods for treating bioprosthetic tissue using a nucleophile/electrophile in a catalytic system
EDWARDS LIFESCIENCES CORP0 citations62
US10238771B2Mar 26, 2019
Methods for treating bioprosthetic tissue using a nucleophile/electrophile in a catalytic system
EDWARDS LIFESCIENCES CORP0 citations52