Inventor
VAN DEN BRINK ENNO
NL7 patents
Patents
7 patentsUS7562686B2Jul 21, 2009
Method and system for 3D alignment in wafer scale integration
ASML NETHERLANDS BV10 citations80
US7570342B2Aug 4, 2009
Radiation exposure apparatus comprising a gas flushing system
ASML NETHERLANDS BV2 citations54
US10705438B2Jul 7, 2020
Lithographic method
ASML NETHERLANDS BV0 citations48
US10571814B2Feb 25, 2020
Lithographic method
ASML NETHERLANDS BV0 citations48
US7675606B2Mar 9, 2010
Lithographic apparatus and method
ASML NETHERLANDS BV1 citations42
US7567340B2Jul 28, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations36
US7844131B2Nov 30, 2010
Lithographic apparatus, a device manufacturing method and a device manufactured thereby
ASML NETHERLANDS BV0 citations26