Inventor
BHAVE MANDAR
US5 patents
Patents
5 patentsUS7364835B2Apr 29, 2008
Developer-soluble materials and methods of using the same in via-first dual damascene applications
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US6962769B2Nov 8, 2005
Anti-reflective coating composition with improved spin bowl compatibility
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US7754818B2Jul 13, 2010
Gap fill materials and bottom anti-reflective coatings comprising hyperbranched polymers
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US7323289B2Jan 29, 2008
Bottom anti-reflective coatings derived from small core molecules with multiple epoxy moieties
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US7745540B2Jun 29, 2010
Gap fill materials and bottom anti-reflective coatings comprising hyperbranched polymers
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