Inventor
WILLIS JAMES E
US9 patents
⚠️ This page may combine multiple inventors who share the name “WILLIS JAMES E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
6 patentsUS7477960B2Jan 13, 2009
Fault detection and classification (FDC) using a run-to-run controller
TOKYO ELECTRON LTD86 citations95
US7300730B1Nov 27, 2007
Creating an optically tunable anti-reflective coating
TOKYO ELECTRON LTD26 citations91
US7213478B2May 8, 2007
Method for automatic configuration of processing system
TOKYO ELECTRON LTD41 citations89
US7763404B2Jul 27, 2010
Methods and apparatus for changing the optical properties of resists
TOKYO ELECTRON LTD7 citations73
US7555395B2Jun 30, 2009
Methods and apparatus for using an optically tunable soft mask to create a profile library
TOKYO ELECTRON LTD5 citations61
US7437199B2Oct 14, 2008
Method for data pre-population
TOKYO ELECTRON LTD6 citations60