Inventor
LEE KUN-HYUNG
JP11 patents
⚠️ This page may combine multiple inventors who share the name “LEE KUN-HYUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
9 patentsUS6679194B2Jan 20, 2004
Cassette table of a semiconductor fabricating apparatus
SAMSUNG ELECTRONICS CO LTD368 citations96
US7850449B2Dec 14, 2010
Heat treatment equipment
SAMSUNG ELECTRONICS CO LTD466 citations95
US5984775ANov 16, 1999
Grating and shutter apparatus for controlling air flow
SAMSUNG ELECTRONICS CO LTD18 citations83
US6093229AJul 25, 2000
Drive checking system for fan filter units in clean room
SAMSUNG ELECTRONICS CO LTD19 citations82
US5993519ANov 30, 1999
Method of exchanging filters in a clean room and auxiliary device for use in the exchanging of the filters
SAMSUNG ELECTRONICS CO LTD18 citations82
US5792226AAug 11, 1998
Air current controlling device and clean room adopting the same
SAMSUNG ELECTRONICS CO LTD7 citations67
US7398801B2Jul 15, 2008
Apparatus and method for processing wafers
SAMSUNG ELECTRONICS CO LTD6 citations62
US7047793B2May 23, 2006
Sensitive substance and surface acoustic wave gas sensor using the same
SAMSUNG ELECTRONICS CO LTD3 citations62
US8043974B2Oct 25, 2011
Semiconductor wet etchant and method of forming interconnection structure using the same
SAMSUNG ELECTRONICS CO LTD4 citations57