Inventor
HIROTSU SHIN
JP10 patents
⚠️ This page may combine multiple inventors who share the name “HIROTSU SHIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
9 patentsUS10672589B2Jun 2, 2020
Plasma processing apparatus and control method
TOKYO ELECTRON LTD45 citations97
US11574798B2Feb 7, 2023
Plasma processing apparatus and control method
TOKYO ELECTRON LTD3 citations72
US12437970B2Oct 7, 2025
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations62
US11764034B2Sep 19, 2023
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations62
US7465670B2Dec 16, 2008
Plasma etching method, plasma etching apparatus, control program and computer storage medium with enhanced selectivity
TOKYO ELECTRON LTD4 citations61
US11830704B2Nov 28, 2023
Plasma processing apparatus and control method
TOKYO ELECTRON LTD0 citations51
US9312105B2Apr 12, 2016
Method for etching insulation film
TOKYO ELECTRON LTD1 citations51
US9418863B2Aug 16, 2016
Method for etching etching target layer
TOKYO ELECTRON LTD1 citations50
US7943523B2May 17, 2011
Plasma etching method and computer readable storage medium
TOKYO ELECTRON LTD0 citations38