Inventor
LIN CHO-YING
TW12 patents
⚠️ This page may combine multiple inventors who share the name “LIN CHO-YING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
8 patentsUS12019378B2Jun 25, 2024
Methods of cleaning a lithography system
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11662668B2May 30, 2023
Lithography contamination control
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US12591182B2Mar 31, 2026
Lithography contamination control
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12372887B2Jul 29, 2025
Methods of cleaning a lithography system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12096544B2Sep 17, 2024
Lithography thermal control
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12055867B2Aug 6, 2024
Lithography contamination control
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11647578B2May 9, 2023
Lithography thermal control
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US11632849B2Apr 18, 2023
Method and apparatus for mitigating contamination
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61