Inventor
HAN PENGYU
US15 patents
⚠️ This page may combine multiple inventors who share the name “HAN PENGYU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
13 patentsUS11421977B2Aug 23, 2022
Eliminating internal reflections in an interferometric endpoint detection system
APPLIED MATERIALS INC4 citations72
US12265377B2Apr 1, 2025
Autonomous substrate processing system
APPLIED MATERIALS INC3 citations71
US11709477B2Jul 25, 2023
Autonomous substrate processing system
APPLIED MATERIALS INC3 citations69
US12567569B2Mar 3, 2026
Optical cable for interferometric endpoint detection
APPLIED MATERIALS INC0 citations62
US12385803B2Aug 12, 2025
Endpoint detection system for enhanced spectral data collection
APPLIED MATERIALS INC0 citations62
US11965798B2Apr 23, 2024
Endpoint detection system for enhanced spectral data collection
APPLIED MATERIALS INC0 citations62
US12066639B2Aug 20, 2024
Adjustable achromatic collimator assembly for endpoint detection systems
APPLIED MATERIALS INC0 citations59
US11719952B2Aug 8, 2023
Adjustable achromatic collimator assembly for endpoint detection systems
APPLIED MATERIALS INC1 citations59
US12236077B2Feb 25, 2025
Methods and mechanisms for generating virtual knobs for model performance tuning
APPLIED MATERIALS INC0 citations56
US12385778B2Aug 12, 2025
Hyper-spectral multi-spot optical reflectometer
APPLIED MATERIALS INC0 citations50
US12106984B2Oct 1, 2024
Accelerating preventative maintenance recovery and recipe optimizing using machine-learning based algorithm
APPLIED MATERIALS INC0 citations50
US11901203B2Feb 13, 2024
Substrate process endpoint detection using machine learning
APPLIED MATERIALS INC0 citations44
US12579444B2Mar 17, 2026
Machine learning model generation and updating for manufacturing equipment
APPLIED MATERIALS INC0 citations41