Inventor
MATSUZAKI SAKAE
JP12 patents
⚠️ This page may combine multiple inventors who share the name “MATSUZAKI SAKAE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DISCO CORP
7 patentsUS9379015B2Jun 28, 2016
Wafer processing method
DISCO CORP3 citations72
US9236264B2Jan 12, 2016
Wafer processing method
DISCO CORP3 citations72
US10410901B2Sep 10, 2019
Electrostatic chuck table using method
DISCO CORP1 citations57
US11241770B2Feb 8, 2022
Support base
DISCO CORP0 citations50
US9159622B2Oct 13, 2015
Dividing method for wafer
DISCO CORP1 citations44
US10847403B2Nov 24, 2020
Method of manufacturing device chips and pick up apparatus
DISCO CORP0 citations40
US10490450B2Nov 26, 2019
Electrostatic chuck table
DISCO CORP0 citations40