Inventor

HORIOKA KAZUHIKO

JP2 patents

Patents

2 patents

US8907567B2Dec 9, 2014

Plasma light source and plasma light generation method

KUWABARA HAJIME5 citations64

US9000402B2Apr 7, 2015

LPP EUV light source and method for producing the same

KUWABARA HAJIME2 citations54