Inventor
MA PAUL
US28 patents
⚠️ This page may combine multiple inventors who share the name “MA PAUL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM IP HOLDING BV
12 patentsUS12237171B1Feb 25, 2025
Method of forming vanadium nitride layer and structure including the vanadium nitride layer
ASM IP HOLDING BV2 citations74
US11885013B2Jan 30, 2024
Method of forming vanadium nitride layer and structure including the vanadium nitride layer
ASM IP HOLDING BV2 citations72
US11901175B2Feb 13, 2024
Method for selective deposition of silicon nitride layer and structure including selectively-deposited silicon nitride layer
ASM IP HOLDING BV2 citations71
US11424119B2Aug 23, 2022
Method for selective deposition of silicon nitride layer and structure including selectively-deposited silicon nitride layer
ASM IP HOLDING BV2 citations71
US12473641B2Nov 18, 2025
Apparatus for providing a gas mixture to a reaction chamber and method of using same
ASM IP HOLDING BV1 citations64
US12351903B2Jul 8, 2025
Method and system for depositing molybdenum layers
ASM IP HOLDING BV0 citations59
US11791153B2Oct 17, 2023
Deposition of hafnium oxide within a high aspect ratio hole
ASM IP HOLDING BV0 citations59
US11674220B2Jun 13, 2023
Method for depositing molybdenum layers using an underlayer
ASM IP HOLDING BV0 citations59
US12472539B2Nov 18, 2025
Methods and apparatus for cleaning a vessel
ASM IP HOLDING BV0 citations58
US12241158B2Mar 4, 2025
Method for forming structures including transition metal layers
ASM IP HOLDING BV1 citations58
US12006572B2Jun 11, 2024
Reactor system including a gas distribution assembly for use with activated species and method of using same
ASM IP HOLDING BV1 citations58
USD1099184SOct 21, 2025
Weighted lift pin
ASM IP HOLDING BV0 citations50
APPLIED MATERIALS INC
10 patentsUS7682946B2Mar 23, 2010
Apparatus and process for plasma-enhanced atomic layer deposition
APPLIED MATERIALS INC40 citations96
US7562672B2Jul 21, 2009
Chemical delivery apparatus for CVD or ALD
APPLIED MATERIALS INC15 citations92
US7833358B2Nov 16, 2010
Method of recovering valuable material from exhaust gas stream of a reaction chamber
APPLIED MATERIALS INC17 citations84
US7748400B2Jul 6, 2010
Chemical delivery apparatus for CVD or ALD
APPLIED MATERIALS INC8 citations84
US7568495B2Aug 4, 2009
Chemical delivery apparatus for CVD or ALD
APPLIED MATERIALS INC9 citations84
US10982326B2Apr 20, 2021
Counter-flow multi inject for atomic layer deposition chamber
APPLIED MATERIALS INC3 citations72
US10487399B2Nov 26, 2019
Atomic layer deposition chamber with counter-flow multi inject
APPLIED MATERIALS INC3 citations72
US7832432B2Nov 16, 2010
Chemical delivery apparatus for CVD or ALD
APPLIED MATERIALS INC3 citations63
US11018009B2May 25, 2021
Tuning work function of p-metal work function films through vapor deposition
APPLIED MATERIALS INC0 citations62
US11421318B2Aug 23, 2022
Methods and apparatus for high reflectivity aluminum layers
APPLIED MATERIALS INC0 citations47