Inventor
AUBUCHON JOSEPH F
US14 patents
⚠️ This page may combine multiple inventors who share the name “AUBUCHON JOSEPH F”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
11 patentsUS7780789B2Aug 24, 2010
Vortex chamber lids for atomic layer deposition
APPLIED MATERIALS INC458 citations98
US11049694B2Jun 29, 2021
Modular microwave source with embedded ground surface
APPLIED MATERIALS INC12 citations85
US9613783B2Apr 4, 2017
Method and apparatus for controlling a magnetic field in a plasma chamber
APPLIED MATERIALS INC7 citations84
US9209074B2Dec 8, 2015
Cobalt deposition on barrier surfaces
APPLIED MATERIALS INC5 citations83
US11670489B2Jun 6, 2023
Modular microwave source with embedded ground surface
APPLIED MATERIALS INC4 citations74
US10115566B2Oct 30, 2018
Method and apparatus for controlling a magnetic field in a plasma chamber
APPLIED MATERIALS INC4 citations73
US9779953B2Oct 3, 2017
Electromagnetic dipole for plasma density tuning in a substrate processing chamber
APPLIED MATERIALS INC6 citations73
US11791136B2Oct 17, 2023
Deposition radial and edge profile tunability through independent control of TEOS flow
APPLIED MATERIALS INC0 citations61
US11017986B2May 25, 2021
Deposition radial and edge profile tunability through independent control of TEOS flow
APPLIED MATERIALS INC0 citations61
US10249479B2Apr 2, 2019
Magnet configurations for radial uniformity tuning of ICP plasmas
APPLIED MATERIALS INC0 citations49
US9659751B2May 23, 2017
System and method for selective coil excitation in inductively coupled plasma processing reactors
APPLIED MATERIALS INC0 citations41