P

Inventor

NARASIMHAN MURALI K

US8 patents
⚠️ This page may combine multiple inventors who share the name “NARASIMHAN MURALI K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

3 patents
US5972178AOct 26, 1999

Continuous process for forming improved titanium nitride barrier layers

APPLIED MATERIALS INC52 citations92
US8617985B2Dec 31, 2013

High temperature tungsten metallization process

APPLIED MATERIALS INC7 citations84
US9209074B2Dec 8, 2015

Cobalt deposition on barrier surfaces

APPLIED MATERIALS INC5 citations83

LU JIANG

1 patent
US9051641B2Jun 9, 2015

Cobalt deposition on barrier surfaces

LU JIANG8 citations82

APPLIED MATERIAL INC

1 patent
US8835311B2Sep 16, 2014

High temperature tungsten metallization process

APPLIED MATERIAL INC4 citations73

KLA TENCOR TECH CORP

1 patent
US7050160B1May 23, 2006

Process and apparatus for integrating sheet resistance measurements and reflectance measurements of a thin film in a common apparatus

KLA TENCOR TECH CORP8 citations72

CHANG MEI

1 patent
US8642473B2Feb 4, 2014

Methods for contact clean

CHANG MEI4 citations67

LUO QIAN

1 patent
US8764961B2Jul 1, 2014

Cu surface plasma treatment to improve gapfill window

LUO QIAN0 citations44