Inventor

KATO SHIGEHIKO

JP3 patents

Patents

3 patents

US11709199B2Jul 25, 2023

Evaluation apparatus for semiconductor device

HITACHI HIGH TECH CORP0 citations60

US11391756B2Jul 19, 2022

Probe module and probe

HITACHI HIGH TECH CORP0 citations60

US11977099B2May 7, 2024

Method for manufacturing semiconductor device

HITACHI HIGH TECH CORP0 citations50