Inventor

HAUPTMANN MARC

BE18 patents

⚠️ This page may combine multiple inventors who share the name “HAUPTMANN MARC”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HAUPTMANN MARC

ASML NETHERLANDS BV

Method and apparatus for obtaining diagnostic information relating to a lithographic manufacturing process, lithographic processing system including diagnostic apparatus

Methods of determining corrections for a patterning process

Methods and apparatus for obtaining diagnostic information relating to a lithographic manufacturing process

Method and apparatus for optimization of lithographic process

Method and apparatus for optimization of lithographic process

Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus

Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus

Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus

Method for generating a control scheme and device manufacturing method

Method for controlling a semiconductor manufacturing process

LUK LAMELLEN & KUPPLUNGSBAU

Method of operating a vehicle transmission

Method of operating a vehicle transmission

Transmission, shiftable in a track pattern

Transmission control system and method for compensating plant changes in a transmission control system of an automatic vehicle transmission

AGC GLASS EUROPE

Solar protection glazing

Low-emissivity and anti-solar glazing

Low-emissivity and anti-solar glazing

MERTENS PAUL

Method and apparatus for cleaning semiconductor substrates