Inventor
PERRIN JEROME
FR8 patents
⚠️ This page may combine multiple inventors who share the name “PERRIN JEROME”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNAXIS BALZERS AG
3 patentsUS6281469B1Aug 28, 2001
Capacitively coupled RF-plasma reactor
UNAXIS BALZERS AG67 citations94
US6890862B2May 10, 2005
Processes for vacuum treating workpieces, and corresponding process equipment
UNAXIS BALZERS AG10 citations73
US6391377B1May 21, 2002
Process for vacuum treating workpieces, and corresponding process equipment
UNAXIS BALZERS AG4 citations62