Inventor

YANG HUAI-TEI

TW78 patents

⚠️ This page may combine multiple inventors who share the name “YANG HUAI-TEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

YANG HUAI-TEI

TAIWAN SEMICONDUCTOR MFG CO LTD

FinFET device and method of forming

Formation and in-situ etching processes for metal layers

P-type strained channel in a fin field effect transistor (FinFET) device

Method of forming source/drain epitaxial stacks

Fully strained channel

Semiconductor structure with dopants diffuse protection and method for forming the same

FinFET device and method of forming the same

Semiconductor device and manufacturing method thereof

Method of forming source/drain epitaxial stacks

Fully strained channel

Etching apparatus and methods of cleaning thereof

Gate structure, semiconductor device and the method of forming semiconductor device

FinFET device and methods of forming same

Method for manufacturing semiconductor structure with source/drain structure having modified shape

Semiconductor structure with source/drain multi-layer structure and method for forming the same

Doping for semiconductor device with conductive feature

Wafer edge trimming tool using abrasive tape

Formation and in-situ etching processes for metal layers

Epitaxy in semiconductor structure and manufacturing method thereof

Method of forming source/drain epitaxial stacks

Fully strained channel

Method of forming source/drain epitaxial stacks

Semiconductor structure with source/drain multi-layer structure and method for forming the same

Semiconductor structure with source/drain structure having modified shape

FinFET device and method of forming

Semiconductor structure with source/drain multi-layer structure and method for forming the same

Method of forming semiconductor device

FinFET device and method of forming

Semiconductor structure with source/drain multi-layer structure and method for forming the same

Methods and systems for dopant activation using microwave radiation

Semiconductor device and method

Silicon intermixing layer for blocking diffusion

Formation and in-situ etching processes for metal layers

Etching apparatus and methods of cleaning thereof

P-type strained channel in a fin field effect transistor (FinFET) device

Doping for semiconductor device with conductive feature

P-type strained channel in a fin field effect transistor (FinFET) device

Doping for semiconductor device with conductive feature

Silicon intermixing layer for blocking diffusion

Doping for semiconductor device with conductive feature

P-type strained channel in a fin field effect transistor (FinFET) device

Semiconductor device and method

EUV collector contamination prevention

High-k metal gate process and device

P-type strained channel in a fin field effect transistor (FinFET) device

TAIWAN SEMICONDUCTOR MFG

Wafer chuck for producing an inert gas blanket and method for using

Method for dry cleaning a wafer container

LAI YI-JEN

Semiconductor device and semiconductor assembly with lead-free solder

HSU CHUN-YUAN

Metal shield structures in backside illumination image sensor chips

PARABELLUM STRATEGIC OPPORTUNITIES FUND LLC

Semiconductor structure with source/drain multi-layer structure and method for forming the same