Inventor

MAHADESWARASWAMY CHETAN

US19 patents

⚠️ This page may combine multiple inventors who share the name “MAHADESWARASWAMY CHETAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MAHADESWARASWAMY CHETAN

APPLIED MATERIALS INC

Component temperature control using a combination of proportional control valves and pulsed valves

Component temperature control using a combination of proportional control valves and pulsed valves

Feedforward temperature control for plasma processing apparatus

Component temperature control by coolant flow control and heater duty cycle control

Temperature control in plasma processing apparatus using pulsed heat transfer fluid flow

MAHADESWARASWAMY CHETAN

Temperature controlled plasma processing chamber component with zone dependent thermal efficiencies

Component temperature control by coolant flow control and heater duty cycle control

Methods of cooling process chamber components

Feedforward temperature control for plasma processing apparatus

NIKON CORP

System and method for controlling a temperature of a reaction assembly

On-board supply system for a stage assembly

On-board supply system for a stage assembly

Magnetic sensor calibration and servo for planar motor stage

X DEV LLC

Infrared and visible imaging system

Infrared and visible imaging system for device identification and tracking

Infrared and visible imaging system for monitoring equipment

Infrared and visible imaging system for monitoring equipment

SILVEIRA FERNANDO M

Temperature control in plasma processing apparatus using pulsed heat transfer fluid flow

GOOGLE LLC

Systems and methods for improved feature extraction using polarization information