Inventor

LIAO BRYAN

US6 patents

⚠️ This page may combine multiple inventors who share the name “LIAO BRYAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

2 patents

US8962488B2Feb 24, 2015

Synchronized radio frequency pulsing for plasma etching

APPLIED MATERIALS INC30 citations93

US9639097B2May 2, 2017

Component temperature control by coolant flow control and heater duty cycle control

APPLIED MATERIALS INC0 citations51

LIAO BRYAN

1 patent

US8404598B2Mar 26, 2013

Synchronized radio frequency pulsing for plasma etching

LIAO BRYAN77 citations94

ZHANG CHUNLEI

1 patent

US8513889B2Aug 20, 2013

Methods and apparatus for tuning matching networks

ZHANG CHUNLEI56 citations93

MAHADESWARASWAMY CHETAN

1 patent

US8880227B2Nov 4, 2014

Component temperature control by coolant flow control and heater duty cycle control

MAHADESWARASWAMY CHETAN11 citations82

WANG JUDY

1 patent

US8133819B2Mar 13, 2012

Plasma etching carbonaceous layers with sulfur-based etchants

WANG JUDY16 citations79