Inventor
SHOJI SERGIO
US5 patents
⚠️ This page may combine multiple inventors who share the name “SHOJI SERGIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
3 patentsUS9741539B2Aug 22, 2017
RF power delivery regulation for processing substrates
APPLIED MATERIALS INC4 citations70
US10468233B2Nov 5, 2019
RF power delivery regulation for processing substrates
APPLIED MATERIALS INC1 citations60
US9639097B2May 2, 2017
Component temperature control by coolant flow control and heater duty cycle control
APPLIED MATERIALS INC0 citations51