Inventor
LEDL LUDWIG
DE3 patents
Patents
3 patentsUS10109451B2Oct 23, 2018
Apparatus configured for enhanced vacuum ultraviolet (VUV) spectral radiant flux and system having the apparatus
APPLIED MATERIALS INC3 citations67
US10345250B2Jul 9, 2019
Method of inspecting a sample with a charged particle beam device, and charged particle beam device
APPLIED MATERIALS INC2 citations66
US7786742B2Aug 31, 2010
Prober for electronic device testing on large area substrates
APPLIED MATERIALS INC2 citations59