Inventor
MUELLER BERNHARD G
DE10 patents
⚠️ This page may combine multiple inventors who share the name “MUELLER BERNHARD G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
8 patentsUS10109451B2Oct 23, 2018
Apparatus configured for enhanced vacuum ultraviolet (VUV) spectral radiant flux and system having the apparatus
APPLIED MATERIALS INC3 citations67
US10345250B2Jul 9, 2019
Method of inspecting a sample with a charged particle beam device, and charged particle beam device
APPLIED MATERIALS INC2 citations66
US12474284B2Nov 18, 2025
Method of inspecting a sample, and multi-electron beam inspection system
APPLIED MATERIALS INC0 citations60
US12562336B2Feb 24, 2026
Method of imaging a sample with a charged particle beam device, method of calibrating a charged particle beam device, and charged particle beam device
APPLIED MATERIALS INC0 citations57
US11610755B2Mar 21, 2023
Method of automatically focusing a charged particle beam on a surface region of a sample, method of calculating a converging set of sharpness values of images of a charged particle beam device and charged particle beam device for imaging a sample
APPLIED MATERIALS INC0 citations55
US11195691B2Dec 7, 2021
Method of automatically focusing a charged particle beam on a surface region of a sample, method of calculating a converging set of sharpness values of images of a charged particle beam device and charged particle beam device for imaging a sample
APPLIED MATERIALS INC0 citations55
US12455313B2Oct 28, 2025
Method for testing a packaging substrate, and apparatus for testing a packaging substrate
APPLIED MATERIALS INC0 citations53
US11687008B2Jun 27, 2023
Method for automated critical dimension measurement on a substrate for display manufacturing, method of inspecting a large area substrate for display manufacturing, apparatus for inspecting a large area substrate for display manufacturing and method of operating thereof
APPLIED MATERIALS INC0 citations40